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Region of Research
Our research activities encompass works on development of process control technologies of surface and interface for advancement of materials joining science and processing technologies through creation of novel process-energy sources (plasmas and particle beams), and span the range of applications from to functionalization of materials to their process control. These research activities are based on fundamental studies on energy transfer dynamics involved in a variety of materials processing with process-energy sources.
Specific areas of research include development and control of meters-scale large-area plasma sources; low-temperature and low-damage processing of functional materials; and studies on temporal and spatial control of discharge for development of innovative plasma sources for plasma medicine.
Current Research Subjects
- Studies on plasma-materials interactions for development of advanced processing technologies
- Development of novel plasma sources and particle beams for advanced process technologies (CVD, PVD)
- Development of novel large-area, low-damage and high-density plasma sources for advanced process control of functional materials
- Creation of softmaterial processing science for development of advanced green nanotechnologies with inorganic/organic flexible hybrid structures
- Studies on temporal and spatial control of discharge for development of innovative plasma sources for plasma medicine
Prof.
Y.Setsuhara
Assoc.Prof.
K.Takenaka
Assist.Prof.
S.Toko
Low-damage and ultra-large-area plasma source with multiple low inductance antenna modules
Development of innovative plasma source for plasma medicine
(a) ICCD images of atmospheric RF plasmas
(b) Frequency dependence of discharge breakdown voltage
(c) Frequency dependence of O optical emission intensity
Our Researches